The purpose ot this article was to survey the microstrcture and various properties (mechanical, optical and electrical) of titanium dioxide TiO2 thin coated deposited on glass substrate by pulsed magnetron sputtering (PMS) method. The coatings were deposited by aputtering pure Ti target at amexture 90% Ar and 10% O2 at a constant total working gas pressure of 5*10-3 mbar. The ... إقراء المزيد

The main objective of this work was to study the microstructure, mechanical, optical and electricial properties of titanium dioxide (TiO2) thin coating deposted on glass substrate by pulsed magnetron sputtering (PMS) technique. The coatings were deposited by sputtering pure Ti target at power of 200W for applied frequencies (AF) from 0kHz to 120kHz and countinuous deposition of 25 min. 10% ... إقراء المزيد