Properties of Titanium Oxynitride Prepared by RF Plasma
Titanium oxynitrides combine the properties of metallic oxides and nitrides. In this presentation, titanium was oxynitrided using inductively coupled RF plasma in a gas mixture containing 80% N2 and 20% O2. The effect of plasma-processing power from 350 up to 550 W on microstructure, mechanical, tribological, wettability and electrochemical properties of the oxynitrided titanium was examined using different characterizations and ... Read more