In this work, the theory of coupled plasma, thermal and elastic waves were used to investigate the wave propagation on semiconductor material during photo-thermo-elastic process. A thin slim strip (TSS) medium, elastic semiconductor with isotropic and homogeneous thermal and elastic properties have been considered. The plasma, thermal and elastic waves in a TSS photo generated by a focused and intensity modulated laser beam were analyzed. Laplace transform techniques and eigenvalue approach were used to obtain the analytical solutions for carrier density, displacement, temperature, and stress. Numerical computations have been carried out on silicon-like semiconductor material. The results are presented graphically to show the effect of the coupling between the plasma, thermal, and elastic waves.