To optimize the tribo-mechanical performance of thick Ti-Si-CN nanocomposite coatings for a wide range of harsh industrial applications, reactive gases of nitrogen and trimethylsilane were employed with specific flow rates of PEMS process. Plasma-enhanced magnetron sputtering (PEMS) was employed for depositing thick Ti-Si-C-N nanocomposite (22-27 µm) on Ti-6Al-4V substrates at relatively high deposition rate up to 4.5 µm/h. Controlling the ... Read more