The thermal stability of optical functional coatings is of prime importance for high-temperature applications. TiO_x_N_y_ films were deposited by reactive dc magnetron sputtering at room temperature. The influence of the annealing temperature on the structural, mechanical and optical properties of amorphous TiO_x_N_y_ films was investigated. Rutherford Backscattering Spectroscopy (RBS) measurements showed no variation in the stoichiometry upon annealing for samples ... Read more

The deposition of optical functional coatings with large rates yet also high refractive index and excellent transparency over a wide spectral range is of paramount importance for many applications. In this study we will demonstrate that TiO_x_N_y_ films can meet these requirements. The films were deposited by reactive dc magnetron sputtering from a metallic titanium target. The sputtering atmosphere consisted ... Read more