Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films
The thermal stability of optical functional coatings is of prime importance for high-temperature applications. TiO_x_N_y_ films were deposited by reactive dc magnetron sputtering at room temperature. The influence of the annealing temperature on the structural, mechanical and optical properties of amorphous TiO_x_N_y_ films was investigated. Rutherford Backscattering Spectroscopy (RBS) measurements showed no variation in the stoichiometry upon annealing for samples ... Read more