Synthesis of Nanostructure TiO2 Films Using Different Applied Powers of Pulsed Magnetron Sputtering
The purpose ot this article was to survey the microstrcture and various properties (mechanical, optical and electrical) of titanium dioxide TiO2 thin coated deposited on glass substrate by pulsed magnetron sputtering (PMS) method. The coatings were deposited by aputtering pure Ti target at amexture 90% Ar and 10% O2 at a constant total working gas pressure of 5*10-3 mbar. The ... إقراء المزيد