Transparent conducting antimony-doped tin oxide SnO2:Sb films were prepared on glass substrates by e-beam evaporation technique. The effect of Sb-content and annealing temperature on the optical, electrical and structural properties of the formed films were investigated. The as-deposited films show amorphous structure and low transmittance that increased with increasing Sb-content. Upon annealing, the film ordering increases. The annealed (SnO2)100–xSbx (x= 3 wt%) films show minimum resistivity of ~ 6 × 10-3 Ω cm at temperature 400 oC and their transmittance exceedes 84 % in the visible region. The other parameters such as free carrier concentrations, refractive index, Urbach energy were calculated for asdeposited and annealed films.