In the present paper, the theory of generalized photo-thermoelasticity under dual phase lag model has been applied to study the coupled thermal, plasma and elastic waves on unbounded semiconductor medium with cylindrical cavity. The bounding surface of the cavity is traction free and loaded thermally by exponentially decaying pulse boundary heat flux. By using Laplace transform and the eigenvalue approach methodology, the solutions of all variables have been obtained analytically. Numerical computations have been done for silicon-like semiconductor material, and the results are displayed graphically to show the difference between the dual phase lag (DPL) model, Lord and Shulman’s theory (LS) and the classical dynamical coupled theory (CT)