Metal plasma immersion ion implantation and deposition (MPIIID) is employed to produce TiAlN hard coatings on Ti substrate. To improve the load-bearing capacity of Ti substrate, nitrogen PIII is used to prepare a bearing TiN layer on Ti-base substrate. The MPIIID process is performed using Ti50:Al50 target for different nitrogen/argon gas fractions. The effect of N2/Ar gas ratio on the ...
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