Mechanical and ellipsometry measurements of thin TiN layer prepared by PIII
Titanium nitrides have good mechanical, biomedical and optical properties, therefore they are used to harden and protect cutting and sliding surfaces and as a non-toxic exterior for bio-medical applications. Nitrogen plasma immersion implantation (PIII), in which the diffusion of nitrogen from low pressure r.f. plasma is combined with the implantation of nitrogen ions at energies up to 30 kV, is ... Read more