Silicon thin films are currently used in different technological areas such as photovoltaic cells [1, 2], thin-film transistors [3], microelectromechanical systems [4], and Li-ion rechargeable batteries [5]. On the other hand, silicon dielectrics are important materials for both microelectronics and integrated optics. In particular, silicon dielectrics have been considered as an appropriate material for fabricating optical waveguides in broadband communications ... Read more