Properties of Nanosontructured Ti-Zr-N Thin Films Prepared by Pulsed Magnetron Sputtering: Applied Power Effect
The effectivness of applied power on structure and tribomechanical properties of Ti-Zr-N films, deposited on AISI304 stainless steel substrate, by pulsed magnetron sputtering PMS technique was investigated. The composition and Ti-Zr-N films properties were varied as the applied power changing from 125 W up to 225 W at a fixed deposition time of 90 min and constant nitrogen / argon ... إقراء المزيد