In this work, the thermoelastic damping of a nano-scale resonator is analyzed by the generalized thermoelasticity theory based on two-temperature model (2TLS). The effect of two-temperature parameter and relaxation time in nano-scale resonator are investigated for beams under clamped conditions. Analytical expressions for deflection, temperature change, frequency shifts, and thermoelastic damping in the beam have been derived. The theories of ... إقراء المزيد