In the present work, in accordance with the generalized theory of thermoelasticity with two thermal relaxation times, the vibration of a thick finite nanobeam resonator has been considered. Both the general thermoelasticity and coupled thermoelasticity (CT) theories with only one relaxation time can be deduced from the present model as special cases. Under clamped conditions for beam, the effect of relaxation times in nanobeam resonator has been investigated. Based on the analytical relationships, the beam deflection, temperature change, frequency shift and thermoelastic damping were investigated and the numerical results were graphically obtained. According to the observed results there is a clear difference between the CT theory, Lord and Shulman’s (LS) theory and Green and Lindsay’s (GL) theory.