Effect of annealing on properties of decorative zirconium oxynitride thin films
Zirconium oxynitrides are excellent candidates for many technological applications, especially decorative applications. For the use of zirconium oxynitrides as decorative coatings, the thermal stability is of crucial importance. Therefore zirconium oxynitrides, containing both oxygen and nitrogen, were prepared by pulsed d.c. reactive magnetron sputtering at _Ƥ_N2 / (_Ƥ_N2 + _Ƥ_O2) of 0.98. The as-prepared films were annealed in air for ... Read more