Thin flms of aluminum zinc oxide (AZO) were fabricated by DC reactive magnetron sputtering from 50 wt% Al/Zn metallic
target. The structure and optical constants of AZO flms were controlled by changing the oxygen (O2) fow rate. X-Ray diffraction revealed that the addition of oxygen transforms the crystalline nature of the metallic Al/Zn to completely amorphous
flm at 4.5 sccm. The flm density, surface roughness and deposition rate were evaluated from X-ray refectometry measurements and they were found to decrease strongly upon transformation from metallic to oxidic sputtering mode. The optical
constants were extracted from the ellipsometry measurements. As O2 fow increased from 4.5 to 30 sccm, the optical band gap
increased from 4.74 to 5.33 eV whereas the refractive index decreased simultaneously. Low resistivity flms were obtained as
O2 fow increased from 0 to 4 sccm whereas insulating flms were obtained for O2 fows above 4 sccm. The results indicated
that by regulating the oxygen fow diverse ZAO flms with diverse chemical stoichiometries and properties can be tuned.