Thin flms of aluminum zinc oxide (AZO) were fabricated by DC reactive magnetron sputtering from 50 wt% Al/Zn metallic target. The structure and optical constants of AZO flms were controlled by changing the oxygen (O2) fow rate. X-Ray diffraction revealed that the addition of oxygen transforms the crystalline nature of the metallic Al/Zn to completely amorphous flm at 4.5 sccm. ...
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